30 April 2001 Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS
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Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425296
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
Abstract
In this paper, the applications of Micro Stereo Lithography for polymer and ceramic based microstructures and MEMS are discussed with some examples.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, Vijay K. Varadan, Vasundara V. Varadan, Vasundara V. Varadan, } "Micro stereo lithography for fabrication of 3D polymeric and ceramic MEMS", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425296; https://doi.org/10.1117/12.425296
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