Operation cycle modeling for electrostatic-type microrelay

Georgy I. Efremov; Nikolay Ivanovich Mukhurov

doi:10.1117/12.425317

30 April 2001 Operation cycle modeling for electrostatic-type microrelay

Georgy I. Efremov, Nikolay Ivanovich Mukhurov

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425317
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Micro-switching devices, in particular, micro-relays occupy a prominent place in the family of MEMS/MOEMS devices. Such devices offer an advantage of insignificant power consumption and good compliance with requirements of integrated microelectronics technology. This paper presents theoretical analysis of the micro-relay operation cycle as a basic process for designing various miniature threshold devices. It is known that operation of electrostatic micro-relays is the result of interaction of active electrostatic forces arising between control circuit electrodes and reactive mechanical forces created by elastic holders of a movable electrode.

Citation Download Citation

Georgy I. Efremov and Nikolay Ivanovich Mukhurov "Operation cycle modeling for electrostatic-type microrelay", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425317

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