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Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation
Statistical design and analysis of computer experiments for the generation of parsimonious metamodels
Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators
Si-based multilayered print circuit board for MEMS packaging fabricated by Si deep etching, bonding, and metal powder injection
Electrostatic actuator designed for capacitive detections of orthogonal displacements of a few micrometers with a subnanometric sensitivity