5 April 2001 Design methods for microelectromechanical bandpass filters
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425373
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A design method for high-order electro-mechanical filters that makes use of the equivalence between lumped-parameters electrical and mechanical systems is presented. Conditions for existence of the equivalent mechanical system are derived, and electro-statical coupling of micro-mechanical resonators is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.
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Dimitri Galayko, Dimitri Galayko, Andreas Kaiser, Andreas Kaiser, } "Design methods for microelectromechanical bandpass filters", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425373; https://doi.org/10.1117/12.425373
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