5 April 2001 Design methods for microelectromechanical bandpass filters
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425373
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A design method for high-order electro-mechanical filters that makes use of the equivalence between lumped-parameters electrical and mechanical systems is presented. Conditions for existence of the equivalent mechanical system are derived, and electro-statical coupling of micro-mechanical resonators is introduced. The application to the simulation and design of a bandpass filter with finite transmission zeros implemented in a thick-layer epi-poly silicon micro-machining technology is shown.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dimitri Galayko, Andreas Kaiser, "Design methods for microelectromechanical bandpass filters", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425373; https://doi.org/10.1117/12.425373
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