5 April 2001 Development of a workstation for optical testing and modification of IMEMS on a wafer
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425356
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer; the other methods are being explored.
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John Hedley, John Hedley, Alun J. Harris, Alun J. Harris, James S. Burdess, James S. Burdess, Mark E. McNie, Mark E. McNie, } "Development of a workstation for optical testing and modification of IMEMS on a wafer", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425356; https://doi.org/10.1117/12.425356
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