5 April 2001 Development of microelectromechanical varactors
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425389
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such as device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350%.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chun-Hsien Lee, Shu-Hui Tsai, Chung-Hsien Lin, Ryutaro Maeda, Jiunn-Jye Tsaur, Kuan-Jen Fang, Ju-Mei Lu, Cheng-Kuo Lee, Weileun Fang, "Development of microelectromechanical varactors", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425389; https://doi.org/10.1117/12.425389
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