5 April 2001 Dynamic simulation of optical MEM switches
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001); doi: 10.1117/12.425349
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
Micro-optical-electrical-mechanical systems (MOEMS) present a new set of challenges for systems on a chip (SoC) and mixed- technology designers including the need for mixed-signal multi-domain simulation. We present new modeling techniques for optical and mechanical MEM components and apply these models to the simulations of a MOEMS switch for optical fiber telecommunications applications.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Timothy P. Kurzweg, Jose A. Martinez, Steven Peter Levitan, Philippe J. Marchand, Donald M. Chiarulli, "Dynamic simulation of optical MEM switches", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425349; https://doi.org/10.1117/12.425349
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Mirrors

Switches

Surface roughness

Computer aided design

Microopto electromechanical systems

Systems modeling

Solid modeling

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