5 April 2001 Electromechanical stability of capacitive transducers
Author Affiliations +
Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425379
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
The stability of micromechanical capacitive transducers depends on the stability of mechanical and electrical properties. Charges trapped on the native oxide layers of the micromechanical electrodes, can create significant electrostatic forces in the absence of an external biasing voltage. The amount of trapped charges fluctuate in time due to various tunneling processes and deteriorate long-term stability of capacitive MEMS sensors. We have investigated the electromechanical stability of commercial angular velocity sensors and low-g accelerometers and found drift rates on the order of 0.01 %/h even after several hours after a step in the bias voltage. After correcting for the drift due to charge tunneling using an empirical fitting functions we find mechanical stabilities in the level of ppm/h.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Aarne S. Oja, Aarne S. Oja, Jukka M. Kyynarainen, Jukka M. Kyynarainen, Heikki Seppa, Heikki Seppa, } "Electromechanical stability of capacitive transducers", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425379; https://doi.org/10.1117/12.425379


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