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5 April 2001 Light-induced parametric amplification in MEMS oscillators
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425400
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
Micromechanical oscillators in the radio frequency (rf) range were fabricated in the form of silicon discs supported by a SiO2 pillar at the disc center. Effective spring constant of this oscillator can be controlled within the range (Delta) f/f approximately 10-4 by a low power laser beam, (Plaser approximately 100 (mu) W), focused at the periphery of the disc. Parametric amplification of the disc's vibrations was achieved through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by non-linear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Self- modulation of the CW laser beam (Plaser approximately 100 (mu) W) provided by placing the disc oscillator into an interference pattern setup can lead to parametric self- excitation.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maxim Zalalutdinov, Anatoli Olkhovets, Alan T. Zehnder, Bojan Ilic, D. Czaplewcki, Jeevak M. Parpia, and Harold G. Craighead "Light-induced parametric amplification in MEMS oscillators", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425400
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