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5 April 2001 Low-voltage vibratory microgyroscope with ASIC control
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425357
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (Application Specific Integrated Circuit) is integrated on the same silicon die to minimize the parasitic effect ant to ensure the high sensitivity of the microgyroscope. In addition, a comparison between comb- actuation and parallel-plate actuation was made mathematically to describe the system dynamics clearly. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yung C. Liang, Tao Zhao, Yong P. Xu, and Siau S. Boh "Low-voltage vibratory microgyroscope with ASIC control", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425357
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