5 April 2001 MEMS torsion: mirrors, nanoprobes, and failure (Abstract Only)
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425363
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
MicroElectroMechanical Systems made from single crystal silicon, and operated in torsion are used to rotate micro- mirrors for adaptive optics and for optical switching, to measure atomic forces, and to characterize the silicon at the micro/nm-scale. The design and characterization of torsion actuators for a mirror array and a scanning probe z-motion actuator will be discussed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Noel C. MacDonald, "MEMS torsion: mirrors, nanoprobes, and failure (Abstract Only)", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425363; https://doi.org/10.1117/12.425363
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