Micromachined rf switches

Ci Moo Song

doi:10.1117/12.425336

5 April 2001 Micromachined rf switches (Abstract Only)

Ci Moo Song

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425336
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

A micromachined and hermetically packaged rf switch with excellent performances and high reliability will be presented. Test results, future challenges for commercialization and possible applications will be addressed.

Citation Download Citation

Ci Moo Song "Micromachined rf switches (Abstract Only)", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425336

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