A micromechanical silicon device suitable for DC-DC voltage up-conversion is investigated theoretically. The behavior of the converter is simulated in the time domain using a circuit simulator. In simulations ignoring parasitic capacitances, DC voltage of level of 16 V is increased to 32 V using a micromechanical converter. The output power is 2 mW for a device with 1 mm2 surface area.
Aarne S. Oja,
"Micromechanical dc-dc converter", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425376; https://doi.org/10.1117/12.425376