5 April 2001 Micromechanical dc-dc converter
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425376
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A micromechanical silicon device suitable for DC-DC voltage up-conversion is investigated theoretically. The behavior of the converter is simulated in the time domain using a circuit simulator. In simulations ignoring parasitic capacitances, DC voltage of level of 16 V is increased to 32 V using a micromechanical converter. The output power is 2 mW for a device with 1 mm2 surface area.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mikko Mottonen, Mikko Mottonen, Aarne S. Oja, Aarne S. Oja, } "Micromechanical dc-dc converter", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425376; https://doi.org/10.1117/12.425376
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