5 April 2001 Optical fiber switch using a draw-bridge mirror for large array of interconnects
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425397
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
This paper reports the design, fabrication and test of a monolithically-integrated 4 X 4 free-space optical crossconnect using microfabricated polysilicon 3D-mirror to enable light-path switching for optical communication applications. The switch consists of 16 pairs of three- dimensional movable mirrors and draw-bride plate actuators, and four input and output fiber-optic guiding rails. The draw- bridge plates actuated by the electrostatic force drive the 3D-mirrors up and down to cut off the light beam or to let the light beam pass through. The optical crossconnect is fabricated using three-layer-polysilicon surface micromachining technology. The size of the whole structures is 5 mm X 5 mm . The maximum driving voltage is about 45 V, and its resonant frequency is about 5 KHz (200 micrometer switch time). The optical insertion loss of about 1.5 dB and the crosstalk of less than -60 dB have been obtained while using GRIN-lens to collimate the input optical signals.
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Ai Qun Liu, Ai Qun Liu, Xu Ming Zhang, Xu Ming Zhang, } "Optical fiber switch using a draw-bridge mirror for large array of interconnects", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425397; https://doi.org/10.1117/12.425397
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