5 April 2001 Replication of refractive micro-optomechanical components made with deep lithography with protons
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425343
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
Deep Lithography with Protons (DLP) is a rapid prototyping technology for the fabrication of 3D micro-optical precision components. In this paper we will demonstrate how we made this DLP technology compatible with commercially available injection-molding and vacuum casting techniques, allowing to mass-replicate high-quality micro-optical modules at low cost. We will illustrate our technology by presenting optical characteristics of different refractive components made in optical-grade plastics such as polymethyl-methacrylate (PMMA), polycarbonate (PC) and semiconductor compatible plastics with high glass-transition temperatures such as COC.
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Patrik Tuteleers, Pedro Vynck, Heidi Ottevaere, Christof Debaes, Alex Hermanne, Irina P. Veretennicoff, Hugo Thienpont, "Replication of refractive micro-optomechanical components made with deep lithography with protons", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425343; https://doi.org/10.1117/12.425343
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