5 April 2001 Thermal and mechanical evaluation of micromachined planar spiral inductors
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425369
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
Micromachined planar spiral inductors and transformers have been largely proposed for RF applications, using MEMS processes. Q-factors and self-resonant frequencies have been significantly increased by suspending such structures. However, thermal and mechanical properties are somewhat compromised. In this paper, a complete analysis of such parameters is presented through extensive finite element method (FEM) simulations. Partially released structure is proposed to avoid these troubles.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Renato P. Ribas, Renato P. Ribas, Jerome Lescot, Jerome Lescot, Jean Louis Leclercq, Jean Louis Leclercq, Bernard Courtois, Bernard Courtois, } "Thermal and mechanical evaluation of micromachined planar spiral inductors", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425369; https://doi.org/10.1117/12.425369
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