5 February 2002 Progress on development of prototype laser reference system for stylus profilometry of large optics
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Proceedings Volume 4411, Large Lenses and Prisms; (2002) https://doi.org/10.1117/12.454885
Event: Large Lenses and Prisms, 2001, London, United Kingdom
Abstract
In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ho-Soon Yang, David D. Walker, "Progress on development of prototype laser reference system for stylus profilometry of large optics", Proc. SPIE 4411, Large Lenses and Prisms, (5 February 2002); doi: 10.1117/12.454885; https://doi.org/10.1117/12.454885
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