14 September 2001 Analysis of the structure of a high-g-force MEMS accelerometer
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Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440208
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China
Abstract
In this paper, several micro-mechanical structures of high g-force MEMS accelerometers will be analyzed; their characteristics will be discussed. Finally, a structure with new features will be given.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ping Song, Kejie Li, Gengchen Shi, "Analysis of the structure of a high-g-force MEMS accelerometer", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440208; https://doi.org/10.1117/12.440208
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