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14 September 2001 Monolithic triaxial accelerometer design in thick-film technology
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Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440205
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China
Abstract
A monolithic triaxial accelerometers based on thick-film technology is presented, and its structure and operating principle are discussed in this paper. Design and fabrication for the accelerometers are described together with theoretical predications and FEM analysis. The sensing elements on elastic membrane were analyzed in particular by COSMOS/M FEM and its geometric structure parameters were optimized. The overall performance of the device suggests that with proper control of screen-printing and firing processes, many applications in advanced industrial requirements will be possible in the near future.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhongcheng Wu, Yu Ge, and Zengfu Wang "Monolithic triaxial accelerometer design in thick-film technology", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440205
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