10 April 2001 Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method
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Proceedings Volume 4415, Optical Organic and Inorganic Materials; (2001) https://doi.org/10.1117/12.425504
Event: Advanced Optical Materials and Devices, 2000, Vilnius, United States
Abstract
The diamond-like carbon films, deposited by direct ion beam deposition method using mixture of C6H14 and H2 with and without silicon presence, have been investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, ellipsometry, IR-visible-UV transmission, and electron paramagnetic resonance techniques. The D and G line widths and peak positions, integrated intensity ratio (ID/IG) in Raman spectra indicate these films being amorphous, mixture of sp2 and sp3 bonds. It has been found that a-C:H films formed while increasing substrate temperature and deposition ion energy tend to be graphite-like. Increasing of hydrogen content in gas mixture made these films more polymer-like with low content of dangling bonds. Traces of silicon increase sp3/sp2 ratio. The DLC films on silicon are able to greatly reduce IR reflection.
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M. Silinskas, M. Silinskas, A. Grigonis, A. Grigonis, G. Dikcius, G. Dikcius, H. Manikowski, H. Manikowski, } "Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method", Proc. SPIE 4415, Optical Organic and Inorganic Materials, (10 April 2001); doi: 10.1117/12.425504; https://doi.org/10.1117/12.425504
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