High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications

Ju Young Joung; Kyung Chan Kim; Insoo S. Kim; Jaehee Park

doi:10.1117/12.426996

8 May 2001 High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications

Ju Young Joung, Kyung Chan Kim, Insoo S. Kim, Jaehee Park

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.426996
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

The miniature fiber optic Fabry-Perot pressure sensor with a silicon diaphragm was developed for medical applications. The configuration of this sensor was a 1-mm long fiber optic Fabry-Perot interferometer bonded to an 80 micrometers -thick diaphragm. The length of the sensor was about 1.5 mm and the area of the diaphragm was 1 mm x 1 mm. The phase shift of the interferometric sensor was proportional to the applied pressure. The relationship between the applied pressure and the phase change was nonlinear.

Citation Download Citation

Ju Young Joung, Kyung Chan Kim, Insoo S. Kim, and Jaehee Park "High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.426996

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