8 May 2001 Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings
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Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427062
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan
Abstract
We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase- modulated signal which is generated from a light diffracted from the endpoint. In order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P1equals100 micrometers and P2equals98 micrometers are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 micrometers for a cylinder metal of 3885.2 micrometers diameter.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki, Osami Sasaki, Kazunori Hashimoto, Kazunori Hashimoto, Yuuji Fujimori, Yuuji Fujimori, Takamasa Suzuki, Takamasa Suzuki, } "Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427062; https://doi.org/10.1117/12.427062
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