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8 May 2001 Nanometric accuracy repositioning contract probe-mount for periodic surface artifacts calibration
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Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427071
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan
Abstract
A contact probe mount with few nanometer repositioning capability for laser interferometric calibration of step- gauges and length bars has been attempted. Design is based on the autocollimetric capabilities of 0.01 sec. of arc capabilities to work out the deviation of the inductive probe which has to be moved up and downward for the positioning of the different facets of the gauge under calibration. A provisional mount has been arranged to study the repeatability and reproducibility of the design of the probe mount. The probe deviations thus observed can be used as correction factors or in improving the mount design to desired level of few nanometer accuracy. The methodology and the experimental setup used for the study is discussed in detail. A repeatability figure of 5 nm obtained with a manual mount conforms the design of the probe mount.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Baij Nath Gupta and Lakhan Singh Tanwar "Nanometric accuracy repositioning contract probe-mount for periodic surface artifacts calibration", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427071
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