Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices

Katsuhiko Miyamoto; Tsutomu Hoshimiya

doi:10.1117/12.427100

8 May 2001 Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices

Katsuhiko Miyamoto, Tsutomu Hoshimiya

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427100
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

A photoacoustic and photothermal deflection imaging apparatus was fabricated using linear-motor-driven slide stages as the scanning tool. It achieved both high resolution scanning (0.1 micrometers step), fast scan (40 mm/sec) and random access. In gas microphone photoacoustic microscope (PAM) operation, the reduction of acoustic noise about 30 dB compared that with pulse-motor-driven pulse stages was achieved. Photothermal defection microscope (PTM) using a high-resolution position sensitive device realized both comparable resolution of thermal image as that of PAM and the open-air environment for nondestructive inspection of solid specimen in common operating software as PAM. Applications of the PAM and PTM to nondestructive evaluation of both surface and undersurface defects of the solid specimens including semiconductor microdevices and a simulated subsurface defect are also demonstrated. Achieved resolution of the thermal images of an integrated circuit fabricated on a silicon substrate obtained using both PAM and PTM was up to 8-12 micrometers .

Citation Download Citation

Katsuhiko Miyamoto and Tsutomu Hoshimiya "Photothermal deflection microscope with linear motor drive and its applications to NDE of microdevices", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427100

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