8 May 2001 Stabilized phase-shifting fringe analysis using current-induced FM feature of laser diodes
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Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427035
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan
Abstract
A closed loop phase shifting Fizeau-type interferometer is constructed by using the direct frequency modulation (FM) of a laser diode. The interferometer is servo controlled fully in the phase domain where optical phases are detected by a two-frequency optical heterodyne method. Detailed study on stabilization of the interferometer under feedback control is conducted both experimentally and theoretically. The interferometer showed a good stabilization against the applied vibration up to 200 Hz. The profile measurement of a mirror surface was conducted by the phase shifting analysis algorithm and a good measurement reproducibility of (lambda) /60 in the root mean square value was obtained for 10 times measurements in a period of 20 min.
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Masayuki Yokota, Atsuyoshi Asaka, Toshihiko T. Yoshino, "Stabilized phase-shifting fringe analysis using current-induced FM feature of laser diodes", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427035; https://doi.org/10.1117/12.427035
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