Paper
8 May 2001 Temperature measurement decreasing measurement error caused by stray lights and unpredictable emissivity
Tomomi Ino, Wataru Yamada, Hiromi Suzuki, Akira Tsumura, Yoshiaki Akama, Naoto Nishida
Author Affiliations +
Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427051
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan
Abstract
A new technique to improve the accuracy of the infrared radiation thermometry is presented. We combine the real time emissivity compensation with the three-colored technique proposed to suppress the effect of stray lights. We first examined the effectiveness of the three-colored technique and found that the measurement error caused by stray lights is decreased from 150 degree(s)C to 10 degree(s)C for the sample of 650 degree(s)C.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tomomi Ino, Wataru Yamada, Hiromi Suzuki, Akira Tsumura, Yoshiaki Akama, and Naoto Nishida "Temperature measurement decreasing measurement error caused by stray lights and unpredictable emissivity", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427051
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KEYWORDS
Temperature metrology

Stray light

Semiconducting wafers

Black bodies

Chemical vapor deposition

Reflectivity

Spectroscopy

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