High-precision triangulation sensing of mirror surface

Sergei Vasilievich Mikhlyaev

doi:10.1117/12.427095

8 May 2001 High-precision triangulation sensing of mirror surface

Sergei Vasilievich Mikhlyaev

Author Affiliations +

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427095
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

The analysis of measurement errors of distance up to a mirror surface by laser triangulation is given. We consider the two types of sensors: with output plane, orthogonal to the optical axis, and with tilted one (corresponding to the Scheimpflug principle). The conditions of Scheimpflug principle applicability for mirror surface testing are determined. We have shown that at the certain ratio between parameters of optical system of the sensor and the probing light beam, the sensor with orthogonal plane of photoregistration can provide smaller level of measurement errors, than sensor with tilted plane, despite the presence of defocusing.

Citation Download Citation

Sergei Vasilievich Mikhlyaev "High-precision triangulation sensing of mirror surface", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427095

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