11 September 2001 High-precision measurement of cylinder form deviations with grazing incidence interferometry
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Proceedings Volume 4420, Laser Metrology for Precision Measurement and Inspection in Industry; (2001) https://doi.org/10.1117/12.439208
Event: Laser Metrology for Precision Management and Inspection in Industry, 2001, Florianopolis, Brazil
Abstract
Grazing incidence interferometry using diffractive elements is a modern laser-optical high precision measuring technique suitable for technical surfaces to measure from deviations of cylinders. Advantages in comparison to tactile measuring techniques consist mainly in a large number of measuring points sampled at the entire cylinder jacket area with high radial resolution in a very short time so that an improved reliability of the measurement, which represents the real surface of the workpiece under test, is achieved. This contribution gives a short introduction to the principle of interferometric cylinder form testing. An own set-up is presented as well as a stationary measuring system, working both according to the transmission method. As a modification of this, a mobile sensor, which is able to measure bores accessible only on one side, is introduced. The potential of grazing incidence interferometry is demonstrated by means of comparative measurements with conventional tactile measuring methods.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Albert Weckenmann, Thomas Kersting, Wilfried Schimke, "High-precision measurement of cylinder form deviations with grazing incidence interferometry", Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439208; https://doi.org/10.1117/12.439208
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