11 September 2001 New generation of lasermike
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Proceedings Volume 4420, Laser Metrology for Precision Measurement and Inspection in Industry; (2001) https://doi.org/10.1117/12.439198
Event: Laser Metrology for Precision Management and Inspection in Industry, 2001, Florianopolis, Brazil
Lasermikes (LMS) measure linear displacement indirectly - through angle and time measuring, assuming constant scan velocity. In order to meet present accuracy requirements the direct method of angular position measurements and the optimization of the system is proposed. The method is based on angular laser microinterferometer measuring directly the deflector scan angle. The obtained resolution was 0.02 inch. The analytical considerations of detector signal led to the creation of 'hump phenomenon' - formed by the light reflected from the object surface and having the decisive influence on the form of detector signal. It is proved that the detector error can be significantly reduced by optimizing the detector system according to the object size and reflectivity. The paper contains the description of the angular laser microinterferometer and its metrological properties and the analysis of detector output signal when scanning the cylindrical object with focused laser beam. It was proved that by introduction of the direct angle measuring method and optimization of the system, the required accuracy of lasermikes can be achieved.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ryszard Jablonski, Ryszard Jablonski, Pawel Fotowicz, Pawel Fotowicz, "New generation of lasermike", Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439198; https://doi.org/10.1117/12.439198

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