26 June 2001 Modification of the surface roughness spectrum by means of power laser radiation
Author Affiliations +
Proceedings Volume 4423, Nonresonant Laser-Matter Interaction (NLMI-10); (2001) https://doi.org/10.1117/12.431203
Event: Nonresonant Laser-Matter Interaction (NLMI-10), 2000, St. Petersburg, Russian Federation
We study the periodic damage structures that can be produced don the rough-surface of semiconductor when they are irradiated with a single beam of intense laser radiation. We observed a formation of periodic surface structures for porous Si with microscopic surface roughens. In the case of more strong rough Ge we observed an opposite effect to ripple formation: i.e. an effective destruction of resonance Fourier components of the random disturbed surface.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valerii P. Aksenov, Valerii P. Aksenov, G. N. Mikhailova, G. N. Mikhailova, Johannes Boneberg, Johannes Boneberg, Paul Leiderer, Paul Leiderer, H.-J. Muenzer, H.-J. Muenzer, } "Modification of the surface roughness spectrum by means of power laser radiation", Proc. SPIE 4423, Nonresonant Laser-Matter Interaction (NLMI-10), (26 June 2001); doi: 10.1117/12.431203; https://doi.org/10.1117/12.431203


Back to Top