Model of a microminiaturized pressure sensor with optical output

Engelbert Hartl; Elena Lavitska; Christoph Schmidtlein

doi:10.1117/12.429776

12 June 2001 Model of a microminiaturized pressure sensor with optical output

Engelbert Hartl, Elena Lavitska, Christoph Schmidtlein

Proceedings Volume 4425, Selected Papers from the International Conference on Optoelectronic Information Technologies; (2001) https://doi.org/10.1117/12.429776
Event: International Conference on Optoelectronic Information Technologies, 2000, Vinnytsia, Ukraine

Abstract

The main steps on the way of practical realization of a microminiaturized Fabry-Perot pressure sensor with a micromachined silicon membrane are presented and discussed. Starting from the mathematical model and FEM-based simulation through the experimental check of operation principle using the scaled sensor model we came to the discussion on technological problems and first results on their solving.

Citation Download Citation

Engelbert Hartl, Elena Lavitska, and Christoph Schmidtlein "Model of a microminiaturized pressure sensor with optical output", Proc. SPIE 4425, Selected Papers from the International Conference on Optoelectronic Information Technologies, (12 June 2001); https://doi.org/10.1117/12.429776

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