12 June 2001 Model of a microminiaturized pressure sensor with optical output
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Proceedings Volume 4425, Selected Papers from the International Conference on Optoelectronic Information Technologies; (2001) https://doi.org/10.1117/12.429776
Event: International Conference on Optoelectronic Information Technologies, 2000, Vinnytsia, Ukraine
Abstract
The main steps on the way of practical realization of a microminiaturized Fabry-Perot pressure sensor with a micromachined silicon membrane are presented and discussed. Starting from the mathematical model and FEM-based simulation through the experimental check of operation principle using the scaled sensor model we came to the discussion on technological problems and first results on their solving.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Engelbert Hartl, Engelbert Hartl, Elena Lavitska, Elena Lavitska, Christoph Schmidtlein, Christoph Schmidtlein, } "Model of a microminiaturized pressure sensor with optical output", Proc. SPIE 4425, Selected Papers from the International Conference on Optoelectronic Information Technologies, (12 June 2001); doi: 10.1117/12.429776; https://doi.org/10.1117/12.429776
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