Fabrication of microlenses and microlens arrays using local melting of glass plate by CO2 laser

Moriaki Wakaki; Yuichi Komachi; Genichi Kanai; Hideo Fukumoto; Shuichi Kawabata

doi:10.1117/12.456867

25 February 2002 Fabrication of microlenses and microlens arrays using local melting of glass plate by CO₂ laser

Moriaki Wakaki, Yuichi Komachi, Genichi Kanai, Hideo Fukumoto, Shuichi Kawabata

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456867
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO₂ laser. By heating the surface of a glass plate locally to a working point of the glass material using CO₂ laser beam, the surface became a hyperboloid owing to surface tension, which resulted in microlens. This method has the merit of complete dry processing. Several types of glass materials were tested. It is important to choose the type of glass with thermostable property with small expansion coefficient. It was found possible to make easily microlens and arrays with different focus lengths by controlling a laser power and a irradiated position. Typically, a CO₂ laser power of 1.5W and an irradiation time of 1.1s were used to fabricate a microlens with a 170 micrometers diameter and 181 micrometers focal length with good focusing property. Microlenses fabricated using various beam profiles of CO₂ laser were also discussed.

Citation Download Citation

Moriaki Wakaki, Yuichi Komachi, Genichi Kanai, Hideo Fukumoto, and Shuichi Kawabata "Fabrication of microlenses and microlens arrays using local melting of glass plate by CO₂ laser", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456867

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
4 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microlens

Glasses

Carbon dioxide lasers

Microlens array

Carbon monoxide

Gas lasers

Aspheric lenses

Show All Keywords

Keywords/Phrases

Search In:

Publication Years