25 February 2002 Hole formation process in laser deep drilling with short and ultrashort pulses
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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456901
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
The drilling process in different materials (diamond, steel, ceramics and PMMA) was studied for a large range of pulse lengths from about 100 fs to 10 ns using different approaches. In transparent materials the penetration process was visualized with high-speed video analysis and microscopy. The drilling rate as well as the relation between processing energy density and ablation threshold were determined in situ. The penetration of the laser beam inside the channel and the influence of laser-ignited plasma were investigated by transmission measurements. Mechanisms of energy coupling and heat losses were examined by applying simple analytical calculations. Proposals for the basic understanding of the drilling process are presented.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Taras V. Kononenko, Taras V. Kononenko, Sergei M. Klimentov, Sergei M. Klimentov, Serge V. Garnov, Serge V. Garnov, Vitali I. Konov, Vitali I. Konov, Detlef Breitling, Detlef Breitling, Christian Foehl, Christian Foehl, Andreas Ruf, Andreas Ruf, Joachim Radtke, Joachim Radtke, Friedrich Dausinger, Friedrich Dausinger, } "Hole formation process in laser deep drilling with short and ultrashort pulses", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456901; https://doi.org/10.1117/12.456901
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