25 February 2002 Laser cleaning of particles from surfaces: issues relating to sample preparation
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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456826
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
Laser cleaning results depend on the particles (form and material), and the method used to deposit them on the surface. Studies using three different pulsed lasers (255 nm and 248 nm) and different particle deposition techniques are contrasted fro removing alumina particles from glass surfaces.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Deb M. Kane, Alanna Fernandes, "Laser cleaning of particles from surfaces: issues relating to sample preparation", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456826; https://doi.org/10.1117/12.456826
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