Laser cleaning technology and its application

Wen Dong Song; Minghui Hong; L. Zhang; Yongfeng Lu; Tow Chong Chong

doi:10.1117/12.456839

25 February 2002 Laser cleaning technology and its application

Wen Dong Song, Minghui Hong, L. Zhang, Yongfeng Lu, Tow Chong Chong

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456839
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Laser cleaning technology has been demonstrated to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. Dry and steam laser cleaning mechanisms and applications in semiconductor and disk drive industry will be addressed.

Citation Download Citation

Wen Dong Song, Minghui Hong, L. Zhang, Yongfeng Lu, and Tow Chong Chong "Laser cleaning technology and its application", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456839

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