25 February 2002 Laser cleaning technology and its application
Author Affiliations +
Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456839
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
Laser cleaning technology has been demonstrated to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. Dry and steam laser cleaning mechanisms and applications in semiconductor and disk drive industry will be addressed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wen Dong Song, Minghui Hong, L. Zhang, Yongfeng Lu, Tow Chong Chong, "Laser cleaning technology and its application", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456839; https://doi.org/10.1117/12.456839
PROCEEDINGS
4 PAGES


SHARE
Back to Top