Laser thinning of the thickness of a-GeS2 films

Shuichi Kawabata; Yoshihisa Murakami; Yasunori Ozawa; Moriaki Wakaki

doi:10.1117/12.456864

25 February 2002 Laser thinning of the thickness of a-GeS₂ films

Shuichi Kawabata, Yoshihisa Murakami, Yasunori Ozawa, Moriaki Wakaki

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456864
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

The amorphous GeS₂ film is one of the chalcogenide glass and also shows the phenomenon of Ag-photodoping under the illumination of the high-pressure mercury lamp. We have been carrying out the in-situ measurements of the photodoping process of Ag/a-GeS₂ films system with a laser probe ellipsometer. In the process of the thickness measurements, we have observed curious changes of ellipsometric parameters (delta) and (Psi) of the GeS₂ film sample during the illumination of the laser probe. The results seem to be suggesting that the illumination of the laser beam might engrave the GeS₂ film. The power of the laser is less than 1mW and the beam diameter is 1mm. The idea such as an ablation of the GeS₂ film seems to be unlikely to interpret this phenomenon.

Citation Download Citation

Shuichi Kawabata, Yoshihisa Murakami, Yasunori Ozawa, and Moriaki Wakaki "Laser thinning of the thickness of a-GeS₂ films", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456864

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