25 February 2002 Optical near-field effects in surface nanostructuring and laser cleaning
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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456827
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
Abstract
We present a method for directly imaging the undisturbed near field of a particle resting on a surface. A comparison with numerical computations shows good agreement with the results of our experiments. These results have important consequences for laser-assisted particle removal where field enhancement may cause local surface damage and is one of the physical key processes in this cleaning method. On the other hand, the application of near fields at particles allows structuring of surfaces with structure dimensions in the order of 100 nm and even below.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H.-J. Muenzer, H.-J. Muenzer, Mario Mosbacher, Mario Mosbacher, M. Bertsch, M. Bertsch, Oliver Dubbers, Oliver Dubbers, F. Burmeister, F. Burmeister, A. Pack, A. Pack, Reinhold Wannemacher, Reinhold Wannemacher, B.-U. Runge, B.-U. Runge, Dieter Baeuerle, Dieter Baeuerle, Johannes Boneberg, Johannes Boneberg, Paul Leiderer, Paul Leiderer, } "Optical near-field effects in surface nanostructuring and laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); doi: 10.1117/12.456827; https://doi.org/10.1117/12.456827
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