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25 February 2002 Peculiarities of steam laser cleaning
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Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002)
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore
The bubble nucleation in liquid laser cleaning is considered. The action of the thermal distribution in the liquid layer at the bubble size, vapor pressure in the bubble and liquid surface tension is investigated. The threshold value of the substrate surface temperature and its dependencies on physical properties of the liquid and surface roughness are defined.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vadim P. Veiko, Elena A. Shakhno, and Boris V. Volkovyski "Peculiarities of steam laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002);


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