Ferroelectric thin films deposited by pulsed laser deposition

Raluca Dinu; I. Vrejoiu; P. Verardi; F. Craciun; Maria Dinescu

doi:10.1117/12.432836

29 June 2001 Ferroelectric thin films deposited by pulsed laser deposition

Raluca Dinu, I. Vrejoiu, P. Verardi, F. Craciun, Maria Dinescu

Proceedings Volume 4430, ROMOPTO 2000: Sixth Conference on Optics; (2001) https://doi.org/10.1117/12.432836
Event: ROMOPTO 2000: Sixth Conference on Optics, 2000, Bucharest, Romania

Abstract

Influence of substrate and electrode on the properties of PbZr_0.53Ti_0.47O₃ (PZT) thin films grown by pulsed laser deposition technique (1060 nm wavelength Nd:YAG laser light, 10 ns pulse duration, 10 Hz repetition rate, 0.35 J/pulse, 25 J/cm² laser fluence, deposition rate about 1 angstrom/pulse) was studied. The substrate temperatures were in the range 380 degree(s)C-400 degree(s)C. Oriented crystalline PZT layers with 1-3 micrometers thickness were deposited on glass substrates plated with Au/Pt/NiCr electrodes, from a PZT commercial target in oxygen reactive atmosphere. The deposited PZT films with perovskite structure were preferentially oriented along the (111) direction as revealed from XRD spectra. Piezoelectric d₃₃ coefficients up to 30 pC/N were obtained on as deposited films. Ferroelectric hysteresis loops at 100 Hz revealed a remanent polarization of 15 (mu) C/cm² and a coercive field of 100 kV/cm. A comparison with properties of PZT films deposited using a KrF laser and with SrBi₂Ta₂O₉ (SBT) films is reported.

Citation Download Citation

Raluca Dinu, I. Vrejoiu, P. Verardi, F. Craciun, and Maria Dinescu "Ferroelectric thin films deposited by pulsed laser deposition", Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); https://doi.org/10.1117/12.432836

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