Optoelectronics silicon on insulator integrated circuits by porous silicon technology

M. Balucani; G. Lamedica; V. Bondarenko; A. Ferrari

doi:10.1117/12.432919

29 June 2001 Optoelectronics silicon on insulator integrated circuits by porous silicon technology

M. Balucani, G. Lamedica, V. Bondarenko, A. Ferrari

Proceedings Volume 4430, ROMOPTO 2000: Sixth Conference on Optics; (2001) https://doi.org/10.1117/12.432919
Event: ROMOPTO 2000: Sixth Conference on Optics, 2000, Bucharest, Romania

Abstract

This work reports on the CMOS-SOI devices based on porous silicon technology (PST) opening the possibility of wafer scale integration realizing on-chip optoelectronic integrated circuits by the PST. Silicon on insulator (SOI) structure based on the preferential anodization of n+ layer within n-/n+/n- were realized. Standard n-type Si (100) have been used as initial substrates. N+ layer have been formed by Sb ion implantation into the front and backside of the substrates followed by annealing. Then an epitaxial layer has been grown on the front of the wafers and projection photolithography using reactive ion etching of both the mask and the epitaxial layer has been used to define three dimensional pattern of islands wherein device components are formed. Characteristics and device layout are presented for partially depleted devices used to build ring oscillator showing that a 1.2 micron resolution in SOI porous silicon technology is comparable with a 0.5 micron CMOS technology.

Citation Download Citation

M. Balucani, G. Lamedica, V. Bondarenko, and A. Ferrari "Optoelectronics silicon on insulator integrated circuits by porous silicon technology", Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); https://doi.org/10.1117/12.432919

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available