13 November 2001 Design, characterization, and applications of multilayer micro-optics
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Multilayer micro-optics combines refractive beam shaping with wavelength selective multiple interference. Layer composition and thickness distribution were optimized by advanced simulation software. Components were fabricated by mask-shaded vapor deposition with planetary rotation. Surface profiles were characterized interferometrically. For two-dimensional reflectance mapping, a high-accuracy automated system was developed. Micro-mirror arrays for self-imaging resonators, mode selective mirrors for miniaturized solid-state lasers and angular-adapted graded AR-coatings for microlenses are presented as applications.
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Ruediger Grunwald, Ruediger Grunwald, Stefan Nerreter, Stefan Nerreter, Uwe Griebner, Uwe Griebner, Hans-Joachim Kuehn, Hans-Joachim Kuehn, } "Design, characterization, and applications of multilayer micro-optics", Proc. SPIE 4437, Gradient Index, Miniature, and Diffractive Optical Systems II, (13 November 2001); doi: 10.1117/12.448158; https://doi.org/10.1117/12.448158

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