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13 November 2001 Integrated guiding structures for automatic alignment of micro-optical components
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Abstract
A novel technique for the realization of guiding structures for passive / automatic alignment is proposed. The technique is based on a recently available special photoresist. This photoresist can be processed by standard lithographic processes and shows a mechanical stability close to glass. Guiding structures may thus be realized in the same process as the functional structures on a substrate. We discuss the material behavior in terms of processing, change of shape due to shrinking or swelling and shear stability. First results of accuracy experiments are shown. As an example we demonstrate fiber ferrules for horizontal and for vertical mounting. We also show alignment structures for fiber/fiber coupling.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ulrich W. Krackhardt and Karl-Heinz Brenner "Integrated guiding structures for automatic alignment of micro-optical components", Proc. SPIE 4437, Gradient Index, Miniature, and Diffractive Optical Systems II, (13 November 2001); https://doi.org/10.1117/12.448145
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