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Subwavelength structure and diffractive optics for optical components in the Joint Research Project for Regional Intensive in Osaka Prefecture
Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence
Farbrication of diffractive optical elements on a Si chip by an imprint lithography using nonsymmetrical silicon mold
Precise proximity correction for fabricating chirped diffraction gratings with direct-writing electron-beam lithography