9 November 2001 Fabrication of glass lenses by melting technology
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Abstract
The paper shows a fabrication technology for glass micro lenses. It starts with the fabrication of a boron phosphorus silicate glass (BPSG) layer on a quartz substrate. Pre-forms of BPSG are fabricated using photolithography and dry etching. After that, temper process at a temperature in between the melting temperature of each material changes the surface to the minimal surface. Spherical, cylindrical and even ball lenses are profiles which can be realized. Spherical, cylindrical, and ball lens profiles that can be produced.
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Ernst-Bernhard Kley, Ernst-Bernhard Kley, Hans-Joerg Fuchs, Hans-Joerg Fuchs, Arnd Kilian, Arnd Kilian, } "Fabrication of glass lenses by melting technology", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448027; https://doi.org/10.1117/12.448027
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