9 November 2001 Interferometrical measurement of cylindrical lenses with the help of computer-generated holograms
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Abstract
Two different methods for the measurement of cylindrical lenses will be presented in this paper. The first method uses the principle of grazing incidence interferometry. A computer generated diffractive optical element (DOE) generates the wave fronts which impinge under grazing incidence onto the surfaces to be tested. The light is reflected at the surfaces and diffracted at a second DOE identical to the first one. The 0-th diffraction order of both DOEs is used as reference wave. The deviations of up to three surfaces (front-side, backside and one of the border sides) of a cylindrical lens from their ideal shape can be measured simultaneously. Additionally, the orientation of these three surfaces with respect to each other are determined. The second method measures the aberrations of a cylindrical lens in transmitted light by using an interferometer of the Mach-Zehnder type. The cylindrical wave of the lens under test is compensated by a DOE which generates a plane wave if the incident wave is an ideal cylindrical wave. So, the wave aberrations of the cylindrical lens can be measured. The set-up is designed for cylindrical lenses with a high numerical aperture of up to 0.8. The principles of both methods and first experimental results will be presented.
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Norbert Lindlein, Norbert Lindlein, Juergen Lamprecht, Juergen Lamprecht, Klaus Mantel, Klaus Mantel, Johannes Schwider, Johannes Schwider, } "Interferometrical measurement of cylindrical lenses with the help of computer-generated holograms", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448032; https://doi.org/10.1117/12.448032
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