Microretarder array for imaging polarimetry in the visible wavelength region

Tetsuya Hamamoto; Hiroshi Toyota; Hisao Kikuta

doi:10.1117/12.448051

9 November 2001 Microretarder array for imaging polarimetry in the visible wavelength region

Tetsuya Hamamoto, Hiroshi Toyota, Hisao Kikuta

Proceedings Volume 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication; (2001) https://doi.org/10.1117/12.448051
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

We made a form birefringent micro-retarder array for the real-time imaging polarimetry. The polarimetry system is composed of an imaging lens, the retarder array, a polarization film, and an image sensor. We fabricated a 92x70 retarder array by the electron-beam lithography and the reactive ion etching. Each retarder was a TiO₂ subwavelength grating of 0.15(mu) nm in a period on a silica substrate. Some polarization images of four Stokes parameters were obtained with the polarimetry system.

Citation Download Citation

Tetsuya Hamamoto, Hiroshi Toyota, and Hisao Kikuta "Microretarder array for imaging polarimetry in the visible wavelength region", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448051

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