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9 November 2001 Thick refractive beam shaping elements applied to laser diodes
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In many laser diode applications, it is necessary to make a beam shaping or beam transformation. One example is the collimation, but often we wish to achieve additional properties like special shapes of the beam. Such beams can be designed with high efficiency and signal quality by means of refractive beam shaping elements. Frequently, we have to vary the beam propagation parameters significantly to fulfil the beam shaping task. If we want to use refractive beam shaping elements, the design results in an element with a large profile depth. A well suited fabrication method for refractive beam shaping elements is the gray tone lithography, however, it is limited by the achievable depth of profile. This means that design and fabrication methods should be taken into account to achieve the advantages of refractive elements. On the one hand, we have to improve fabrication technique for enlarging the producible profile depth. On the other hand, we have to use all of the design freedoms to reduce the profile depth. We will present results of the design and fabrication of a refractive beam shaping element with a profile depth up to 60micrometers to transform a laser diode beam into a line intensity distribution.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Cumme, Holger Hartung, Lars-Christian Wittig, and Ernst-Bernhard Kley "Thick refractive beam shaping elements applied to laser diodes", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001);

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